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APPLIED ENGINEERING CASE

Simulation-Led Process Development

Thermal studies for high-frequency heating equipment and laser-wafer process development.

以熱模型比較高周波鋼材加熱與晶圓雷射製程的參數、溫度分布及影響範圍

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Animated induction-heating temperature fieldAnimated laser-wafer heating temperature field
RoleThermal modeling and parameter studies
StageEngineering development support
CategoryThermal-Fluid Intelligence

Project Background.

This page records two studies that use the same workflow: high-frequency heating of carbon-steel wire and laser processing of power-device wafers. Both required a parameter study before repeated equipment trials.

Engineering
Problem.

For induction heating, frequency and heating time change penetration depth, heating rate, and uniformity. For laser processing, power and focal depth change the temperature field, gradient, and affected region.

What We
Did.

We built electromagnetic and thermal models, changed one parameter set at a time, and reviewed temperature fields and time histories. The results were used to define settings for the next equipment or process trial.

Project Outputs.

  • Model assumptions and boundary conditions
  • Frequency, power, focal-depth, and time studies
  • Temperature fields, histories, and gradients
  • Suggested ranges for the next physical trial
  • Equipment and process review material
  • Engineering report and exported plots

Work Sequence.

01

Inputs

Set the geometry, material data, and target temperature

02

Model

Represent electromagnetic heating and heat transfer

03

Parameter Runs

Change frequency, power, focal depth, and time

04

Result Review

Compare fields, histories, gradients, and uniformity

05

Working Range

Select settings for the next physical trial

06

Engineering Use

Use the results in equipment and process discussions

Images and Outputs.

Induction-heating temperature distribution over time
Induction heating: simulated temperature distribution around the workpiece and coil.
Induction-heating temperature history and thermal gradient
Induction heating: temperature history used to compare heating time and uniformity.
Physical high-frequency induction-heating equipment and coil
Induction heating: equipment and coil used for physical development work.
Laser-wafer heating simulation over time
Laser process: simulated heat input and temperature spread through the wafer.
Laser process temperature history and depth-direction thermal gradient
Laser process: temperature history and depth-direction gradient.

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